Description
IXRF Systems’ ATLAS SEMI microEDXRF spectrometer is the very latest micro/small spot energy dispersive X-ray fluorescence (EDXRF) spectrometer for semiconductor metrology. Designed to image and analyze wafers up to 300mm diameter, ATLAS leads the industry in virtually every major specification category from the largest chamber and the highest detector active area, to the longest mapping travel and smallest micro-spot.
Hardware specifications are only half of the ATLAS AdvantageTM. ATLAS’ Iridium Ultra software platform, developed with SEM-EDS elemental mapping and analytical functionality, is unsurpassed in it’s ability to provide elemental and phase mapping, line scans, critical dimensions (CD) as well as qualitative and quantitative elemental analyses of multi-layer thin film stacks. The functional, flexible, and feature-rich software suite guarantees unprecedented productivity. ATLAS SEMI is not just an instrument, it is the microXRF metrology tool that leads with innovation.
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