ZSX Primus 400

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Wavelength dispersive X-ray fluorescence spectrometer

Elemental analysis by XRF of large objects with micro-mapping

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Rigaku’s unique ZSX Primus 400 sequential wavelength dispersive X-ray fluorescence (WD-XRF) spectrometer was specifically designed to handle very large and/or heavy samples. Accepting samples up to 400 mm diameter, 50 mm thick and 30 kg mass, this system is ideal for analyzing sputtering targets, magnetic disks, or for multilayer film metrology or elemental analysis of large samples.

XRF with customized sample adapter system

Having the versatility to adapt to your specific sample types and analysis needs, this WDXRF spectrometer is adaptable to various sample sizes and shapes using optional (made to order) adapter inserts. With a variable measurement spot (30 mm to 0.5 mm diameter, with 5-step automatic selection) and mapping capability with multi-point measurements to check for sample uniformity, this uniquely flexible instrument can dramatically streamline your quality control processes.

XRF with available camera and special lighting
Optional real-time camera allows the analysis area to be viewed within software. The operator has complete certainty as to what is being measured.

Traditional WDXRF analytical capabilities

All analytical capabilities of a traditional instrument are retained in this “large sample” variant. Analyze beryllium (Be) through uranium (U) with high-resolution, high-precision WDXRF spectroscopy, from solids to liquids and powders to thin films. Analyze wide composition ranges (ppm to tens of percent) and thicknesses (sub Å to mm). Optionally available is diffraction peak interference rejection, for optimal results for single-crystal substrates. Rigaku ZSX Primus 400 wavelength dispersive X-ray fluorescence (WD-XRF) spectrometer complies with industry standards SEMI and CE.

ZSX Primus 400 applications

  • Sputtering target composition
  • Isolation films: SiO2, BPSG, PSG, AsSG, Si₃N₄, SiOF, SiON, etc.
  • High-k and ferro-dielectric films: PZT, BST, SBT, Ta₂O₅, HfSiOx
  • Metal films: Al-Cu-Si, W, TiW, Co, TiN, TaN, Ta-Al, Ir, Pt, Ru, Au, Ni, etc.
  • Electrode films: doped poly-Si (dopant: B, N, O, P, As), amorphous-Si, WSix, Pt, etc.
  • Other doped films (As, P), trapped inert gas (Ne, Ar, Kr, etc.), C (DLC)
  • Ferroelectric thin films, FRAM, MRAM, GMR, TMR; PCM, GST, GeTe
  • Solder bump composition: SnAg, SnAgCuNi
  • MEMS: thickness and composition of ZnO, AlN, PZT
  • SAW device process: thickness and composition of AlN, ZnO, ZnS, SiO2 (piezo film); Al, AlCu, AlSc, AlTi (electrode film)

ZSX Primus 400 accessories

  • Sample camera with special lighting allows the analysis point to be viewed on screen
  • Diffraction interference rejection provides accurate results for single-crystal substrates
  • Fundamental Parameters software for thin film analysis


  • Large sample analysis
    • Up to 400 mm (diameter)
    • Up to 50 mm (thickness)
    • Up to 30 kg (mass)
  • Sample adapter system
    • Adaptable to various sample sizes
  • Measurement spot
    • 30 mm to 0.5 mm diameter
    • 5-step automatic selection
  • Mapping capability
    • Allows multipoint measurements
  • Sample view camera (option)
  • General purpose
    • Analyze Be – U
    • Elemental range: ppm to %
    • Thickness range: sub Å to mm
  • Diffraction interference rejection (option)
    • Accurate results for single-crystal substrates
  • Compliance with industry standards
    • SEMI, CE marking
  • Small footprint
    • 50% footprint of the previous model

ZSX Primus 400 Specifications

Outline   Elemental range   ₄Be – ₉₂U
  Optics   Wavelength dispersive
X-ray generator     X-ray tube   End window type, Rh-anode
  4 kW
  High voltage generator   High frequency inverter system
  Max. Rating: 4 kW, 60 kV – 150 mA
Spectrometer   Maximum sample size   400 mm diameter, 50 mm height, ≤30 kg.
Optional adapters are available for various size
samples with irregular shapes.
  Primary X-ray filters   Automatic exchanger (Max. 7 filter)
Ni400, Ni40, Al125, Al25 (standard)
Ti, Sn (Diff action interference rejection, optional)
Be30 (Protection of X-ray tube, optional)
  Analysis area diaphragm     30, 20, 10, 1, 0.5 mm φ
  Crystal exchanger   Maximum 10 crystals
Measurement   Detector   Heavy elements: SC
Light elements: F-PC

Installation requirements

Power   3 phase 200/208 V 50 A,
Single phase 100-240 V 50/60 Hz (PC)
Ground   Independent ground with resistance less than 30 Ω
Cooling water   Quality: Equivalent to drinking water
Temperature: Lower than 30 ˚C
Pressure: 0.29-0.49 MPa
Flow: More than 5 L/min
Drainage   Open drainage
Room temperature     15-28°C with daily variation within ±2˚C
Humidity   Lower than 75% RH
Vibration   Lower than human sensitive level
P-10 gas   Ar 90% Methane 10% Mixture gas pressure 0.15 MPa