ZSX Primus

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Wavelength dispersive X-Ray fluorescence spectrometer

High performance WDXRF for rapid quantitative elemental analysis

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Rigaku ZSX Primus delivers rapid quantitative determination of major and minor atomic elements, from beryllium (Be) through uranium (U), in a wide variety of sample types — with minimal standards.

Powerful, flexible and reliable elemental analysis

The latest instrument in Rigaku’s ZSX series, the ZSX Primus continues the tradition of delivering accurate results in a timely and seamless manner, with unsurpassed reliability, flexibility, and ease of use to meet any challenges in today’s laboratory.

Low-Z performance with mapping and multi-spot analysis

Providing superior performance with the flexibility for analyzing the most complex samples, the ZSX Primus features a 30 micron tube, the thinnest end-window tube available in the industry, for exceptional light element (low-Z) detection limits. Combined with the most advanced mapping package to detect homogeneity and inclusions, the ZSX Primus allows easy detailed investigation of samples that provide analytical insights not easily obtained by other analytical methodologies. Available multi-spot analysis also helps to eliminate sampling errors in inhomogeneous materials.

SQX fundamental parameters with EZ-scan software

EZ-scan allows users to analyze unknown samples without any prior setup. This time saving feature requires only a few clicks of the mouse and a sample name to be entered. Combined with SQX fundamental parameters software, it provides the most accurate and rapid XRF results possible. SQX is capable of automatically correcting for all matrix effects, including line overlaps. SQX can also correct for secondary excitation effect by photoelectrons (light and ultra-light elements), varying atmospheres, impurities and different sample sizes. Increased accuracy is achieved using matching library and perfect scan analysis programs.


  • Analysis of elements from Be to U
  • Small footprint uses less valuable lab space
  • Micro analysis to analyze samples as small as 500 μm
  • Tube-below design is optimized for liquids and loose powders
  • 30μ tube delivers superior light element performance
  • Mapping feature for elemental topography/distribution
  • Helium seal means the optics are always under vacuum

ZSX Primus specifications

  Elemental coverage ₄Be through ₉₂U
  Optics Wavelength dispersive, sequential, tube below
X-ray generator
  X-ray tube End window, Rh-anode, 3kW or 4 kW, 60kV
  HV power supply High frequency inverter, ultra-high stability
  Cooling Internal water-to-water heat exchanger
  Sample changer 48 positions standard, 104 SSLS optional
  Sample inlet Air lock system
  Maximum sample size 51 mm (diameter) by 30 mm (high)
  Sample rotation speed 30 rpm
  Primary X-ray filters Al25, Al125, Ni40, Ni400 and Be (optional, for window protection)
  Beam collimators 6 auto-selectable diameters: 35, 30, 20, 10, 1 and 0.5 mm
27 mm can be selected instead of 30 mm for SSLS
  Divergence slit 3 auto-selectable: standard, high, and coarse (optional) resolutions
  Receiving slit For SC and for F-PC detectors
  Goniometer θ – 2θ independent drive mechanism
  Angular range SC: 5-118°, F-PC: 13-148°
  Angular reproducibility Ultra-high precision
  Continuous scan 0.1 – 240°/min
  Crystal changer 10 crystals, automatic mechanism
  Vacuum system 2 pump high-speed system w/ (optional) powder trap
  He flush system Optional, with partition
Detector systems
  Heavy element detector Scintillation counter (SC)
  Light element detector Flow proportional counter (F-PC)
  Attenuator In-out automatic exchanger (1/10)